In 1997, ASML began studying a shift to using extreme ultraviolet and in 1999 joined a research consortium including Intel, two other U.S. chipmakers, as well as the US Department of Energy. It collaborated with the Belgian Imec and Sematech and turned to Carl Zeiss in Germany for its need of mirrors.[22]
In 2000, ASML acquired the Silicon Valley Group (SVG), a US lithography equipment manufacturer, in a bid to supply 193 nm scanners to Intel Corp.[23][24]
In 2015, ASML suffered intellectual property theft. A number of employees had been found stealing confidential data from its Silicon Valley software subsidiary that develops software for machine optimization.
https://en.wikipedia.org/wiki/ASML_Holding